Integrated waveguide interferometer with picometric performances
| Autor: | Serge Olivier, Hongyu Guan, Alexia Missoffe, Pierre Millier, Luc Chassagne, Barthelemy Cagneau |
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| Přispěvatelé: | Laboratoire d'Ingénierie des Systèmes de Versailles (LISV), Université de Versailles Saint-Quentin-en-Yvelines (UVSQ), DAM Île-de-France (DAM/DIF), Direction des Applications Militaires (DAM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Chassagne, Luc |
| Jazyk: | angličtina |
| Rok vydání: | 2014 |
| Předmět: |
Physics
business.industry Sensors Flicker [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 02 engineering and technology 021001 nanoscience & nanotechnology Metrology 01 natural sciences Waveguide (optics) law.invention Power (physics) 010309 optics Lens (optics) Interferometry Optics law Interferometry measurements 0103 physical sciences Range (statistics) Allan variance [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology business |
| Zdroj: | AIM 2014-IEEE/ASME International Conference on Advanced Intelligent Mechatronic AIM 2014-IEEE/ASME International Conference on Advanced Intelligent Mechatronic, Jul 2014, Besançon, France. pp.1134-1138 AIM |
| Popis: | International audience; We present an integrated optical waveguide interferometer highly compact and easy-to-use. Metrological study is focused on the resolution and the noise level of the sensor. A standard Allan deviation lower than 50 pm has been observed in standard environment. Power spectral densities up to 150 fm.Hz-1/2 at 10 kHz are achieved. The flicker level is not reached because of the environmental conditions but the high frequency noise is likely to be lower than 100 fm. Hz-1/2. We present measures for steps of 0.5 nm at a sample frequency of 1 kHz. Although we use it as sensing motions measurement over micrometric range, the maximum displacement range is 5 centimeters depending on the output lens which is used. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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