Stylus profiling instrument for measuring statistical properties of smooth optical surfaces

Autor:	J. H. Dancy, J. M. Bennett
Rok vydání:	2010
Předmět:	Materials science business.industry Materials Science (miscellaneous) Lateral resolution Industrial and Manufacturing Engineering Light scattering Metrology Autocovariance Optics Surface roughness Spatial frequency Business and International Management business Stylus Laser beams
Zdroj:	Applied optics. 20(10)
ISSN:	1559-128X
Popis:	A surface profiling instrument is described which produces digitized surface profiles and other statistical data. Sharp styli are available that can give height resolution of the order of 1-2 A and lateral resolution of a few tenths of a micrometer on smooth surfaces. The stylus loading can be adjusted so that no permanent marks are left on the surface. Representative surface profiles and autocovariance functions are shown for various materials, and roughnesses measured with the instrument are compared with values obtained using other techniques.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::680bf3085a59977361ca68cb5a81c905 https://pubmed.ncbi.nlm.nih.gov/20332837 Zobrazit plný text záznamu