Comparison of RSG-MOSFET and capacitive MEMS resonator detection
| Autor: | F. Casset, K. Boucart, Pascal Ancey, K. Segueni, Adrian M. Ionescu, N. Abele, V. Pott |
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| Rok vydání: | 2005 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Capacitive sensing Vibration detection Electrical engineering Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Capacitive detection Computer Science::Other Computer Science::Hardware Architecture Resonator MOSFET Narrow beam Optoelectronics Condensed Matter::Strongly Correlated Electrons Electrical and Electronic Engineering business Signal amplification |
| Zdroj: | Electronics Letters. 41:242 |
| ISSN: | 0013-5194 |
| DOI: | 10.1049/el:20047409 |
| Popis: | A simulation comparison of MOSFET and double-metal-plate capacitive techniques for vibration detection of MEMS resonator and sensor applications is reported. A novel resonant suspended-gate MOSFET (RSG-MOSFET) analytical model is developed and used for simulating the mechanical and electrical behaviour of the resonant device under electrostatic actuation. It is demonstrated that a MOS-based detection offers signal amplification advantages over conventional capacitive detection especially for narrow beam resonators. |
| Databáze: | OpenAIRE |
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