Overcoming the challenges of high-energy X-ray ptychography

Autor: Marie Ruat, Cyril Ponchut, Jean Claude Labiche, O. Hignette, Alexandra Pacureanu, Cyril Guilloud, Yang Yang, Murielle Salomé, Christophe Jarnias, Sylvain Bohic, Peter Cloetens, Julio Cesar da Silva
Přispěvatelé: Matériaux, Rayonnements, Structure (MRS), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), European Synchrotron Radiation Facility (ESRF)
Rok vydání: 2018
Předmět:
Diffraction
Nuclear and High Energy Physics
X-ray ptychography
Optics and Photonics
Materials science
Astrophysics::High Energy Astrophysical Phenomena
coherent X-ray diffraction
02 engineering and technology
01 natural sciences
law.invention
010309 optics
Speckle pattern
Optics
X-Ray Diffraction
law
0103 physical sciences
[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]
nano-imaging
high-energy X-rays
Instrumentation
Lithography
[PHYS]Physics [physics]
Radiation
business.industry
X-Rays
Equipment Design
Models
Theoretical

021001 nanoscience & nanotechnology
Coherent diffraction imaging
KB mirrors
Synchrotron
Ptychography
coherence
Radiographic Image Enhancement
Beamline
High-energy X-rays
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Gold
0210 nano-technology
business
[SPI.SIGNAL]Engineering Sciences [physics]/Signal and Image processing
Synchrotrons
Zdroj: Journal of Synchrotron Radiation
Journal of Synchrotron Radiation, International Union of Crystallography, 2019, 26 (5), pp.1751-1762. ⟨10.1107/S1600577519006301⟩
ISSN: 1600-5775
0909-0495
DOI: 10.1107/S1600577519006301⟩
Popis: International audience; X-ray ptychography is a coherent diffraction imaging technique with a high resolving power and excellent quantitative capabilities. Although very popular in synchrotron facilities nowadays, its implementation with X-ray energies above 15 keV is very rare due to the challenges imposed by the high energies. Here, the implementation of high-energy X-ray ptychography at 17 and 33.6 keV is demonstrated and solutions to overcome the important challenges are provided. Among the particular aspects addressed are the use of an efficient high-energy detector, a long synchrotron beamline for the high degree of spatial coherence, a beam with 1% monochromaticity providing high flux, and efficient multilayer coated Kirkpatrick-Baez X-ray optics to shape the beam. The constraints imposed by the large energy bandwidth are carefully analyzed, as well as the requirements to sample correctly the high-energy diffraction patterns with small speckle size. In this context, optimized scanning trajectories allow the total acquisition time to be reduced by up to 35%. The paper explores these innovative solutions at the ID16A nano-imaging beamline by ptychographic imaging of a 200 nm-thick gold lithography sample.
Databáze: OpenAIRE