Overcoming the challenges of high-energy X-ray ptychography
Autor: | Marie Ruat, Cyril Ponchut, Jean Claude Labiche, O. Hignette, Alexandra Pacureanu, Cyril Guilloud, Yang Yang, Murielle Salomé, Christophe Jarnias, Sylvain Bohic, Peter Cloetens, Julio Cesar da Silva |
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Přispěvatelé: | Matériaux, Rayonnements, Structure (MRS), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), European Synchrotron Radiation Facility (ESRF) |
Rok vydání: | 2018 |
Předmět: |
Diffraction
Nuclear and High Energy Physics X-ray ptychography Optics and Photonics Materials science Astrophysics::High Energy Astrophysical Phenomena coherent X-ray diffraction 02 engineering and technology 01 natural sciences law.invention 010309 optics Speckle pattern Optics X-Ray Diffraction law 0103 physical sciences [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] nano-imaging high-energy X-rays Instrumentation Lithography [PHYS]Physics [physics] Radiation business.industry X-Rays Equipment Design Models Theoretical 021001 nanoscience & nanotechnology Coherent diffraction imaging KB mirrors Synchrotron Ptychography coherence Radiographic Image Enhancement Beamline High-energy X-rays [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic Gold 0210 nano-technology business [SPI.SIGNAL]Engineering Sciences [physics]/Signal and Image processing Synchrotrons |
Zdroj: | Journal of Synchrotron Radiation Journal of Synchrotron Radiation, International Union of Crystallography, 2019, 26 (5), pp.1751-1762. ⟨10.1107/S1600577519006301⟩ |
ISSN: | 1600-5775 0909-0495 |
DOI: | 10.1107/S1600577519006301⟩ |
Popis: | International audience; X-ray ptychography is a coherent diffraction imaging technique with a high resolving power and excellent quantitative capabilities. Although very popular in synchrotron facilities nowadays, its implementation with X-ray energies above 15 keV is very rare due to the challenges imposed by the high energies. Here, the implementation of high-energy X-ray ptychography at 17 and 33.6 keV is demonstrated and solutions to overcome the important challenges are provided. Among the particular aspects addressed are the use of an efficient high-energy detector, a long synchrotron beamline for the high degree of spatial coherence, a beam with 1% monochromaticity providing high flux, and efficient multilayer coated Kirkpatrick-Baez X-ray optics to shape the beam. The constraints imposed by the large energy bandwidth are carefully analyzed, as well as the requirements to sample correctly the high-energy diffraction patterns with small speckle size. In this context, optimized scanning trajectories allow the total acquisition time to be reduced by up to 35%. The paper explores these innovative solutions at the ID16A nano-imaging beamline by ptychographic imaging of a 200 nm-thick gold lithography sample. |
Databáze: | OpenAIRE |
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