Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process
| Autor: | Turowski, Marcus, Jupé, Marco, Melzig, Thomas, Pflug, Andreas, Ristau, Detlev, Lequime, Michel, Macleod, H. Angus |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Direct simulation Monte Carlo
Optical films Characterization Thin films Systems analysis Molecular dynamics Simulation technique Thin-film properties Coatings Models ddc:530 Ion Beam Sputtering Density Functional Theory Konferenzschrift Ions Substrates Multiple scale models Experimental characterization Modeling thin film growth Sputtering Monte Carlo methods Coating process parameter Ion beams Film growth Ion-beam sputtering Aluminum coatings Material transport Dewey Decimal Classification::500 | Naturwissenschaften::530 | Physik Angular distribution Aluminum |
| Zdroj: | Optical Systems Design 2015: Advances in Optical Thin Films V : 7-10 September 2015, Jena, Germany Proceedings of SPIE 9627 (2015) |
| Popis: | A multiple scale model approach is presented in order to investigate Al2O3 thin film growth in the framework of an existing Ion Beam Sputtering (IBS) coating process. Therefore, several simulation techniques are combined via optimized interfaces for realizing the concept of a virtual coater. Characteristic coating process parameters of the IBS coating plant are applied as input parameters to model the material transport in the chamber, the energy and angular distribution of the coating material at the substrate, the formation of structural thin film properties, and the optical as well as the electronic layer properties. The resulting thin film properties are validated to the data of an experimental IBS Al2O3 single layer prepared applying the underlying coating facility. The comparison accounts for a good agreement between the modeled layer properties using the virtual coater concept and the experimental characterization data. © 2015 SPIE. BMBF/13N13215 EC/CORNET ERA-NET/IGF 101 EN Volkswagen Stiftung Ministry for Science and Culture of Lower Saxony |
| Databáze: | OpenAIRE |
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