Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

Autor: Arup Biswas, R. K. Puri, K. D. Lagoo, R. D. Veerapur, Debnath Bhattacharyya, Saibal Basu, Ajaya Kumar, Surendra Singh, Debarati Bhattacharya, R. Sampathkumar, N.K. Sahoo, M. Padmanabhan
Rok vydání: 2015
Předmět:
Zdroj: The Review of scientific instruments. 85(12)
ISSN: 1089-7623
Popis: Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å(-1) (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.
Databáze: OpenAIRE