Resolution Improvement Method for Non-Destructive Imaging with Near-Field Scanning Microwave Microscopy
| Autor: | Sijia Gu, Tuami Lasri, Tianjun Lin |
|---|---|
| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization - IEMN (MITEC - IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science adaptive and robust statistical method business.industry Noise (signal processing) Resolution (electron density) position/signal difference method Near and far field Image processing 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences near-field scanning microwave microscopy [SPI]Engineering Sciences [physics] Optics Microwave imaging Distortion 0103 physical sciences subsurface imaging 0210 nano-technology business spatial resolution Image resolution Microwave |
| Zdroj: | 48th European Microwave Conference, EuMC 2018 48th European Microwave Conference, EuMC 2018, Sep 2018, Madrid, Spain. pp.1053-1056, ⟨10.23919/EuMC.2018.8541554⟩ |
| DOI: | 10.23919/eumc.2018.8541554 |
| Popis: | International audience; In this paper we report a resolution enhancement method for non-destructive imaging application with near-field scanning microwave microscopy (NFMM). The technique proposed for the image processing is based on the combination of the position/signal difference (PSD) method and an adaptive robust statistical (ARS) method. The NFMM, is built up with a vector network analyzer (VNA), an evanescent microwave probe (EMP), a high resolution motorized XYZ stage, and a data acquisition system. Thanks to the broadband matching network based on an interferometric technique, the electromagnetic coupling between the probe and sample can be adjusted to guarantee a high measurement sensitivity at any frequency from 2 to 18 GHz. Experimental results demonstrate that the proposed resolution enhancement solution can effectively correct the distortion caused by multiple parameters such as measurement noise and tilt errors of the sample. The post-processing technique associated to the microwave instrumentation result in an improvement of spatial resolution for non-destructive evaluation. © 2018 European Microwave Association. |
| Databáze: | OpenAIRE |
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