Maskless Interdigitated A-Si:H Pecvd Process on Full M0 C-Si Wafer: Homogeneity and Passivation Assessment

Autor:	Karim Ouaras, Sergej Filonovich, Bastien Bruneau, Junkang Wang, Monalisa Ghosh, Erik Johnson
Rok vydání:	2022
Předmět:	History Polymers and Plastics Renewable Energy Sustainability and the Environment Business and International Management Industrial and Manufacturing Engineering Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	SSRN Electronic Journal.
ISSN:	1556-5068
DOI:	10.2139/ssrn.4089582
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::654f13f9e71819e24f350bf362465bf6 https://doi.org/10.2139/ssrn.4089582 Zobrazit plný text záznamu