In-line characterization of nanostructures produced by roll-to-roll nanoimprinting
| Autor: | Raimo Korhonen, Brian Bilenberg, Maksim Zalkovskij, Jonas Skovlund Madsen, Mathias Geisler, Mikkel Berri Lotz, Søren Alkærsig Jensen, Poul Erik Hansen, Petri Peltonen |
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| Rok vydání: | 2021 |
| Předmět: |
medicine.medical_specialty
3D optical data storage Materials science Nanostructure business.industry Hyperspectral imaging 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Spectral imaging Metrology Roll-to-roll processing Characterization (materials science) 010309 optics Optics 0103 physical sciences medicine 0210 nano-technology business Nanoscopic scale |
| Zdroj: | Optics Express. 29:3882 |
| ISSN: | 1094-4087 |
| Popis: | We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min. The system combines the ease of use of a real-space imaging system with the spectral information used in scatterometry. We present nanoscale dimensional measurements on one-dimensional line gratings with various periods and orientations. The depths of the produced structures are accurately characterized with uncertainties on the scale of a few nanometers. The hyperspectral imaging capabilities of the system can also be used to avoid vibrational effects. |
| Databáze: | OpenAIRE |
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