High NA diffractive array illuminators and application in a multi-spot scanning microscope
| Autor: | Bas Hulsken, Sjoerd Stallinga, Dirk L. J. Vossen |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Diffraction
Physics Microscope diffractive optics Scanning electron microscope business.industry Phase (waves) ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION High resolution array illuminator Atomic and Molecular Physics and Optics law.invention Large sample Optics OA-Fund TU Delft law Microscopy microscopy business Spot scanning |
| Zdroj: | Journal of the European Optical Society Rapid Publications, 7, 2012 |
| ISSN: | 1990-2573 |
| DOI: | 10.2971/jeos.2012.12026 |
| Popis: | Array illuminators generating spots with high NA at high efficiency are presented. They are designed via application of high-NA scalar optics methods, and implemented as periodic binary phase structures. These array illuminators are used in a multi-spot scanning microscope for scanning large sample areas with a relatively high resolution. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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