Multiple scattering in scanning helium microscopy
| Autor: | Stefan Przyborski, L Vozdecký, Matthew Bergin, Andrew P. Jardine, Sam Lambrick, David J. Ward, John E. Halpin, Donald A. MacLaren, Paul C. Dastoor |
|---|---|
| Přispěvatelé: | Lambrick, SM [0000-0003-0720-6071], Halpin, JE [0000-0003-3313-5190], Maclaren, DA [0000-0003-0641-686X], Dastoor, PC [0000-0002-6573-7148], Przyborski, SA [0000-0001-7613-525X], Ward, DJ [0000-0002-1587-7011], Apollo - University of Cambridge Repository |
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Materials science Physics and Astronomy (miscellaneous) Ion beam business.industry Scattering chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Signal Optics chemistry 0103 physical sciences Atom Microscopy 0210 nano-technology Porosity business 51 Physical Sciences Helium Distributed ray tracing 4006 Communications Engineering 40 Engineering |
| Zdroj: | Applied physics letters, 2020, Vol.116(6), pp.061601 [Peer Reviewed Journal] |
| ISSN: | 0003-6951 |
| Popis: | Using atom beams to image the surface of samples in real space is an emerging technique that delivers unique contrast from delicate samples. Here, we explore the contrast that arises from multiple scattering of helium atoms, a specific process that plays an important role in forming topographic contrast in scanning helium microscopy (SHeM) images. A test sample consisting of a series of trenches of varying depths was prepared by ion beam milling. SHeM images of shallow trenches (depth/width 1) exhibited an enhanced intensity. The scattered helium signal was modeled analytically and simulated numerically using Monte Carlo ray tracing. Both approaches gave excellent agreement with the experimental data and confirmed that the enhancement was due to localization of scattered helium atoms due to multiple scattering. The results were used to interpret SHeM images of a bio-technologically relevant sample with a deep porous structure, highlighting the relevance of multiple scattering in SHeM image interpretation. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|