Stress sensitivity coefficients of HBAR
| Autor: | Lesage Jean-Marc, Ballandras Sylvain, Combe Guillaume, Petrini Valerie, Baron Thomas, Clairet Alexandre, Laroche Thierry, Dulmet Bernard, Martin Gilles |
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| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Frec|N|Sys (Frec|N|Sys), Femto-st, Temps-fréquence |
| Rok vydání: | 2015 |
| Předmět: |
[SPI.OTHER]Engineering Sciences [physics]/Other
Physics [SPI.OTHER] Engineering Sciences [physics]/Other Computation Acoustics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Vibration Stress (mechanics) Active compensation Resonator Acceleration 0103 physical sciences Sensitivity (control systems) Physics::Chemical Physics 0210 nano-technology 010301 acoustics |
| Zdroj: | International Frequency Control Symposium and European Frequency and Time Forum International Frequency Control Symposium and European Frequency and Time Forum, Apr 2015, Denver, United States |
| DOI: | 10.1109/fcs.2015.7138826 |
| Popis: | International audience; Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. Vibration sensitivity can be due to the resonator, the oscillator loop or non-oscillator components like wire, for instance. Commonly, the main source of acceleration sensitivity is due to the resonator. Active compensation can be used to decrease this effect, but such systems are not easily miniaturized. This paper presents computations of the stress sensitivity coefficients of frequency for the high-overtone bulk acoustic resonators and the design of a simple packaging to minimize vibration sensitivity. The final goal is to control vibration sensitivity of the high-overtone bulk acoustic resonators with dedicated packaging. The computed results are compared to experimental ones. The agreement between theoretical and experimental results is about 50%. |
| Databáze: | OpenAIRE |
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