Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
Autor: | Humber Furlan, W. Chiappim, Mariana A. Fraga, Argemiro Soares da Silva Sobrinho, G. E. Testoni, Homero Santiago Maciel, Gilberto Petraconi, Rodrigo Sávio Pessoa, F.S. Miranda, David Ardiles Saravia |
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Rok vydání: | 2021 |
Předmět: |
Materials science
doping 02 engineering and technology 010402 general chemistry 01 natural sciences Article aluminum oxide chemistry.chemical_compound Atomic layer deposition Monolayer TJ1-1570 nanolaminates Mechanical engineering and machinery Electrical and Electronic Engineering Thin film plasma-enhanced atomic layer deposition superstoichiometry titanium dioxide business.industry Mechanical Engineering Doping 021001 nanoscience & nanotechnology 0104 chemical sciences Amorphous solid Semiconductor chemistry Chemical engineering Control and Systems Engineering Titanium dioxide 0210 nano-technology business Refractive index |
Zdroj: | Micromachines, Vol 12, Iss 588, p 588 (2021) Micromachines Volume 12 Issue 6 |
ISSN: | 2072-666X |
Popis: | The chemical, structural, morphological, and optical properties of Al-doped TiO2 thin films, called TiO2/Al2O3 nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si < 100> and commercial SLG glass were discussed. High-quality PEALD TiO2/Al2O3 nanolaminates were produced in the amorphous and crystalline phases. All crystalline nanolaminates have an overabundance of oxygen, while amorphous ones lack oxygen. The superabundance of oxygen on the crystalline film surface was illustrated by a schematic representation that described this phenomenon observed for PEALD TiO2/Al2O3 nanolaminates. The transition from crystalline to amorphous phase increased the surface hardness and the optical gap and decreased the refractive index. Therefore, the doping effect of TiO2 by the insertion of Al2O3 monolayers showed that it is possible to adjust different parameters of the thin-film material and to control, for example, the mobility of the hole-electron pair in the metal-insulator-devices semiconductors, corrosion protection, and optical properties, which are crucial for application in a wide range of technological areas, such as those used to manufacture fluorescence biosensors, photodetectors, and solar cells, among other devices. |
Databáze: | OpenAIRE |
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