Ultrahigh Sensitivity to Strain of Cracked Thin Films Based on Metallic Nanoparticles in a Dielectric Matrix
| Autor: | C. Malhaire, Rémi Rafael, Solène Brottet, Etienne Puyoo |
|---|---|
| Přispěvatelé: | INL - Dispositifs Electroniques (INL - DE), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Strain (chemistry) Scanning electron microscope 02 engineering and technology Bending 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Atomic layer deposition Electrical resistance and conductance Gauge factor Electrical and Electronic Engineering Thin film Composite material [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology Instrumentation Strain gauge ComputingMilieux_MISCELLANEOUS |
| Zdroj: | IEEE Sensors Letters IEEE Sensors Letters, IEEE, 2018, 2 (3), pp.1-4. ⟨10.1109/LSENS.2018.2865883⟩ |
| ISSN: | 2475-1472 |
| Popis: | Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electromechanical response is tested under mechanical bending at strain levels up to 1. Sudden changes in electrical resistance are observed above 0.6 strain when straight cracks are formed in the nanostructured thin film. Scanning electron microscope (SEM) experiments reveal that these cracks are preferentially formed next to the interface with aluminum top electrodes. After crack formation, a giant gauge factor of 2 104 is measured at a strain level of 0.3. This high sensitivity to strain is attributed to the gradual opening (or closing) of the cracks when mechanical strain is applied. Finally, we demonstrate the feasibility of a flexible heart rate monitor, which integrates a cracked Pt nanoparticle-based strain gauge. |
| Databáze: | OpenAIRE |
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