Material-specific imaging of nanolayers using extreme ultraviolet coherence tomography
Autor: | G. Schmidl, Johann J. Abel, Jonathan Plentz, Christian Rödel, Martin Wünsche, Sergiy Yulin, Julius Reinhard, S. Skruszewicz, Uwe Hübner, Felix Wiesner, Jan Nathanael, Silvio Fuchs, Gerhard G. Paulus, Annett Gawlik |
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Přispěvatelé: | Publica |
Jazyk: | angličtina |
Rok vydání: | 2021 |
Předmět: |
Materials science
medicine.diagnostic_test business.industry Mask inspection Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Interferometry Optical coherence tomography Extreme ultraviolet medicine Optoelectronics ddc:620 business Nanoscopic scale Ultrashort pulse Lithography Coherence (physics) |
Zdroj: | Optica 8(2), 230 (2021). doi:10.1364/OPTICA.412036 |
DOI: | 10.15120/gsi-2021-00494 |
Popis: | Optica 8(2), 230 (2021). doi:10.1364/OPTICA.412036 Published by OSA, Washington, DC |
Databáze: | OpenAIRE |
Externí odkaz: |