COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF6 PLASMAS
| Autor: | Pascal André, Vincent Rat, Marie-Françoise Elchinger, Pierre Fauchais, Jacque Aubreton, André Lefort |
|---|---|
| Přispěvatelé: | Axe 2 : procédés de traitements de surface, Science des Procédés Céramiques et de Traitements de Surface (SPCTS), Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire arc électrique et plasmas thermiques (LAEPT), Centre National de la Recherche Scientifique (CNRS)-Université Blaise Pascal - Clermont-Ferrand 2 (UBP), Pierre Fauchais, Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Centre National de la Recherche Scientifique (CNRS), André, Pascal |
| Rok vydání: | 2011 |
| Předmět: |
[PHYS]Physics [physics]
Electron density Atmospheric pressure Chemistry Thermal Plasmas Kinetics 52.25 Fi Analytical chemistry General Medicine Kinetic energy 7. Clean energy Reaction rate [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] [PHYS.PHYS.PHYS-PLASM-PH] Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] multi-temperature multitemperature Electron temperature Chemical equilibrium SF6 plasma composition SF6 Equilibrium constant |
| Zdroj: | Progress in Plasma Processing of Materials 2001 Proceedings of the Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001 Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001 Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001, 2001, France. pp.411-418 High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, 2011, 15 (2), pp.105-113. ⟨10.1615/HighTempMatProc.v15.i2⟩ High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, Begell House, 2011, 15 (2), pp.105-113. ⟨10.1615/HighTempMatProc.v15.i2⟩ |
| ISSN: | 1093-3611 1940-4360 |
| DOI: | 10.1615/hightempmatproc.v15.i2.30 |
| Popis: | International audience; In this paper we compare the compositions calculated in chemical equilibrium for an SF6 plasma at atmospheric pressure, in the multi-temperature model and using kinetics (33 reactions involving 18 species). The ratio of the electron temperature Te to that of heavy species Th was calculated as a function of electron density and an intermediate temperature T* between Te and Th was introduced to cope with the relationship kf (T*)/kr(T*) = KX(T*) where kf and kr are the reaction rate coefficients (forward and reverse) and KX the equilibrium constant. The main difference between equilibrium and kinetic calculations lies in the densities of S+, S2+, SF+, F− and S− species between 2,000 and 6,000 K. The multi-temperature method gives results very different from those of the kinetic calculations even when the charge loss reactions are neglected. This is in contrast to what happens with H2 or N2. |
| Databáze: | OpenAIRE |
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