Thermally regulated valve for minute flows
| Autor: | Hugo Nguyen, Johan Bejhed, Johan Köhler, Greger Thornell |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: |
plastic deformation
Materials science Needle valve microfluidics elastic deformation Globe valve Cylinder (engine) law.invention microvalves law Valve seat Materialteknik Helium mass spectrometer Composite material stainless steel thermal expansion aluminium Metallurgy silicon Surfaces and Interfaces Materials Engineering Condensed Matter Physics Gate valve Surfaces Coatings and Films Ball valve aluminum elemental semiconductors Butterfly valve |
| Popis: | In this work, a gas valve using a microstructured silicon valve lid and a stainless steel valve seat clamped axially together in an aluminum cylinder is investigated. The difference in coefficient of thermal expansion of these components makes the valve open and close on a temperature change. A simple model accounting for elastic deformation of the system’s components is proposed to facilitate design of the valve. By means of a helium leak detector, a typical increase in flow rate from 1.0×10−8 to 1.0×10−4 sccs gaseous helium under a pressure of up to 10 bars was observed upon the increase of temperature from 12 to around 98 °C, after a single breaking-in. Plastic deformation of the valve seat as a consequence of an imprint of the microstructured valve lid and contaminating particles was studied. Microscopy confirmed a tolerance for particles of up to a few micrometers in diameter. Larger particles were found to be a possible cause of failure. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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