Kinetics Study on Initial Growth Stage in Vapor Deposition of Organic Thin Film Using Quartz Crystal Microbalance

Autor:	Kiyoshi Hagihara, Shinya Onoda, Masaaki Kino, Atsushi Kubono, Takaya Ito
Rok vydání:	2011
Předmět:	Materials science Physics and Astronomy (miscellaneous) Kinetics General Engineering Analytical chemistry General Physics and Astronomy Substrate (chemistry) Rate equation Quartz crystal microbalance Chemical vapor deposition Physisorption Deposition (phase transition) Thin film
Zdroj:	Japanese Journal of Applied Physics. 50:060209
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.50.060209
Popis:	The deposition behavior of stearic acid evaporated in vacuum was observed using a quartz crystal microbalance technique, and the time evolution curves of the amount of admolecules in the initial growth were compared with a theoretical curve calculated using a rate equation proposed on the basis of physisorption. From the results, it was demonstrated that the proposed rate equation for the early stage of film formation well described the experimental results and the growth kinetics of organic thin films was dependent on the substrate temperature. Basic parameters for thin-film growth, such as the mean stay time on the substrate of deposited molecules, can be estimated from the fitting of the theoretical equation to the experimental results at each substrate temperature. It should be noted that the basic parameters were sensitive to a small change in substrate temperature.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5fd83609ff3f3a1e242619610ed184b9 https://doi.org/10.1143/jjap.50.060209 Zobrazit plný text záznamu