Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei

Autor:	Topală, Pavel, Rusnac, Vladislav, Guzgan, Dorin, Ojegov, Alexandr
Jazyk:	Romanian; Moldavian; Moldovan
Rok vydání:	2020
Předmět:	impuls molecule discharge atomi education plasmă USARB equipment and supplies cluster impulse semiconductoare
DOI:	10.5281/zenodo.3625756
Popis:	The paper presents the results of experimental investigations aimed at the formation of thin oxide films on semiconductor surfaces by plasma applying. The morphology of obtained films depending on the electrode base material is examined. A special interest presents clusters formed on the semiconductor surfaces after processing, which highlights new properties that differ from the properties of the separate molecules and of the base material. Topală, Pavel. Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei / Pavel Topală, Vladislav Rusnac, Dorin Guzgan, Alexandr Ojegov // Tradiţie şi inovare în cercetarea ştiinţifică, Ediţia a 5-a : Materialele Colloquia Professorum din 10 octombrie 2014. – Bălţi. – 2015. – P. 212-217.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5f7f8f40d434f4ed1044073c53d8fc6e Zobrazit plný text záznamu