Production of a large-volume negative-ion source using a multistring-type CF4magnetized plasma

Autor: M. Abid Imtiaz, Shuichi Tsuruta, Tetsu Mieno
Rok vydání: 2007
Předmět:
Zdroj: Plasma Sources Science and Technology. 16:324-329
ISSN: 1361-6595
0963-0252
DOI: 10.1088/0963-0252/16/2/015
Popis: A multistring-type CF4 plasma has been produced by setting a multihole-type metal obstacle plate in a magnetized electron cyclotron resonance plasma. Separative diffusion of negative ions (F−) has been realized in the region downstream of the obstacle plate around the string-type plasma columns. Langmuir probes are used to estimate negative-ion density using the modified Bohm model. The experiment reveals that F− density is of the order of 1015–6 × 1015 m−3 around the multistring-type plasma. A column-type negative-ion source with a diameter of about 20 cm and a cross section of about 300 cm2 is realized, which could be scaled up by introducing more string plasmas. The ratio of negative-ion density to electron density around the plasma column is in the range 10–150.
Databáze: OpenAIRE