Design, modelling and simulation of a High Frequency MEMS Gyroscope in 1.5um SOI
| Autor: | K. Seetharaman, J.J.M Bontemps, J.J. Koning, Paddy J. French, P.J. Ngana |
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| Rok vydání: | 2009 |
| Předmět: |
Microelectromechanical systems
Chemistry(all) Rate integrating gyroscope Computer science Vibrating structure gyroscope Mode (statistics) Silicon on insulator Mode Matching Gyroscope General Medicine Square plate law.invention MEMS Quality (physics) law Chemical Engineering(all) Electronic engineering Voltage |
| Zdroj: | Procedia Chemistry. 1:903-906 |
| ISSN: | 1876-6196 |
| DOI: | 10.1016/j.proche.2009.07.225 |
| Popis: | In this paper, a simulation model of a MEMS gyroscope is presented. The model enables mode matching and analysis of the dynamic behavior of a gyroscope. Furthermore, the model allows the optimization the design parameters of the gyroscope. The simulated gyroscope operates at a frequency of 52MHz with amplitudes of 10nm and quality factor of 50,000. Finally, the drive mode measurements are presented at different bias voltages. |
| Databáze: | OpenAIRE |
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