High-performance silver-dielectric interference filters for RGBIR imaging
| Autor: | Frédéric Ritton, Guillaume Rodriguez, Agathe André, Loubna El Melhaoui, Lilian Masarotto, Stephane Minoret, Pascale Parrein, Sophie Verrun, Laurent Frey |
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| Přispěvatelé: | Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Institut des Systèmes Intelligents et de Robotique (ISIR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Direction Generale de la Competitivite, de l'Industrie et des Services (DGCIS) (NANO2017 project) |
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Pixel business.industry Multispectral image 02 engineering and technology Filter (signal processing) 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics 010309 optics [SPI]Engineering Sciences [physics] Optics Transmission (telecommunications) CMOS Interference (communication) 0103 physical sciences RGB color model Color filter array 0210 nano-technology business |
| Zdroj: | Optics Letters Optics Letters, Optical Society of America-OSA Publishing, 2018, 43 (6), pp.1355. ⟨10.1364/OL.43.001355⟩ Optics Letters, 2018, 43 (6), pp.1355. ⟨10.1364/OL.43.001355⟩ |
| ISSN: | 1539-4794 0146-9592 |
| DOI: | 10.1364/ol.43.001355 |
| Popis: | International audience; New architectures of interference silver-dielectric multilayer filters inspired from induced transmission designs are investigated with the prospect of high-performance red-greenblue (RGB) complementary metal oxide semiconductor imaging. The optimized designs provide combined colorimetric, signal-to-noise ratio and sensitivity performances similar to the traditional organic color filters, but without the equirement of an external infrared (IR)-cut filter, which enables the integration of additional channels such as white or IR, in addition to RGB. Due to the sub-micrometer thickness of the stacks, this is a unique solution for fully integrated, high-performance multispectral filters patterned in very small pixels. The concept is demonstrated by a wafer-scale prototype with RGBIR filters patterned down to 1.4 mu m adjacent pixels with up to 80% transmission. |
| Databáze: | OpenAIRE |
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