Study on the Electrical, Structural, Chemical and Optical Properties of PVD Ta(N) Films Deposited with Different N2 Flow Rates
| Autor: | Jing Zhang, Rasadujjaman, Yanrong Wang, Jiang Yan, Mikhail R. Baklanov, Yingying Hu |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
optical properties
Materials science Silicon Analytical chemistry chemistry.chemical_element 02 engineering and technology Crystal structure 01 natural sciences spectroscopic ellipsometry Crystal chemistry.chemical_compound Tantalum nitride X-ray photoelectron spectroscopy Electrical resistivity and conductivity Phase (matter) 0103 physical sciences Materials Chemistry 010302 applied physics structural properties tantalum nitride Surfaces and Interfaces Sputter deposition 021001 nanoscience & nanotechnology Engineering (General). Civil engineering (General) Surfaces Coatings and Films chemistry elemental composition electrical properties TA1-2040 0210 nano-technology |
| Zdroj: | Coatings, Vol 11, Iss 937, p 937 (2021) Coatings Volume 11 Issue 8 |
| ISSN: | 2079-6412 |
| Popis: | By reactive DC magnetron sputtering from a pure Ta target onto silicon substrates, Ta(N) films were prepared with different N2 flow rates of 0, 12, 17, 25, 38, and 58 sccm. The effects of N2 flow rate on the electrical properties, crystal structure, elemental composition, and optical properties of Ta(N) were studied. These properties were characterized by the four-probe method, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and spectroscopic ellipsometry (SE). Results show that the deposition rate decreases with an increase of N2 flows. Furthermore, as resistivity increases, the crystal size decreases, the crystal structure transitions from β-Ta to TaN(111), and finally becomes the N-rich phase Ta3N5(130, 040). Studying the optical properties, it is found that there are differences in the refractive index (n) and extinction coefficient (k) of Ta(N) with different thicknesses and different N2 flow rates, depending on the crystal size and crystal phase structure. |
| Databáze: | OpenAIRE |
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