Micropower thermoelectric generator from thin Si membranes
| Autor: | Javier Rodríguez-Viejo, Gemma Garcia, P. Ferrando-Villaba, A.M. Lopez, Antonio P. Pérez-Marín, Ll. Abad, F.X. Muñoz-Pascual, Aitor F. Lopeandía |
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| Přispěvatelé: | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica, Universitat Politècnica de Catalunya. INSIDE - Innovació en Sistemes per al Disseny i la Formació a l'Enginyeria |
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Microelectrònica Membranes (Technology) Si membrane Thermogenerator Metal oxide semiconductors Complementary Silici -- Propietats elèctriques Seebeck coefficient Thermoelectric effect General Materials Science Electrical and Electronic Engineering Electrotècnia Power density Power output Renewable Energy Sustainability and the Environment business.industry Thermoelectric CMOS Electrical engineering Planar thermoelectric generator Micropower Energies::Termoenergètica [Àrees temàtiques de la UPC] Thermoelectric materials Low-dimensional Si Thermoelectric generator Optoelectronics business Energy harvesting |
| Zdroj: | Recercat. Dipósit de la Recerca de Catalunya Universitat Jaume I UPCommons. Portal del coneixement obert de la UPC Universitat Politècnica de Catalunya (UPC) |
| ISSN: | 2211-2855 |
| DOI: | 10.1016/j.nanoen.2013.12.007 |
| Popis: | We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100 nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5 µW/cm2, under a temperature difference of 5 K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging. |
| Databáze: | OpenAIRE |
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