MEMS Scanning Calorimeter With Serpentine-Shaped Platinum Resistors for Characterizations of Microsamples
| Autor: | Sami Youssef, Jean Podlecki, A. Foucaran, Brice Sorli, O. Cyril, R. Al Asmar |
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| Přispěvatelé: | Unité de Recherche de Physique des Solides [Monastir], Faculté des Sciences de Monastir (FSM), Université de Monastir - University of Monastir (UM)-Université de Monastir - University of Monastir (UM), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, MicroCapteurs et Acoustique (M2A), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Micro électronique, Composants, Systèmes, Efficacité Energétique (M@CSEE) |
| Rok vydání: | 2009 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Silicon Heating element Mechanical Engineering Analytical chemistry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Temperature measurement [SPI.TRON]Engineering Sciences [physics]/Electronics Calorimeter chemistry.chemical_compound Differential scanning calorimetry Silicon nitride chemistry 0103 physical sciences Wafer Electrical and Electronic Engineering Composite material 0210 nano-technology ComputingMilieux_MISCELLANEOUS |
| Zdroj: | Journal of Microelectromechanical Systems Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2009, 18 (2), pp.414-423. ⟨10.1109/JMEMS.2009.2013392⟩ |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2009.2013392 |
| Popis: | We report a new design and operation of a microelectromechanical systems (MEMS) differential scanning calorimeter (DSC) for heat-capacity measurements. The sensor consists of a 500-nm silicon nitride membrane supported by four bridges on a silicon wafer. On one side of the membrane, a serpentine-shaped platinum layer is deposited and used as both a resistive heater and a thermometer during the DSC measurement. This MEMS design can provide a self-alignment between the DSC cell and the material to be analyzed in order to prevent its deposition on the sloping side walls of the silicon frame. According to FEM calculations, the system exhibits good thermal isolation and high uniformities in the temperature field in the sensing area of the device. To evaluate the use of this calorimetric device for liquid samples, we measure the heat of vaporization of nanoliter-scale water droplets with high preciseness using the calorimeter in both scanning and heat conduction modes. |
| Databáze: | OpenAIRE |
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