Spatial Analytical Surface Structure Mapping for Three-dimensional Micro-shaped Si by Micro-beam Reflection High-energy Electron Diffraction
| Autor: | Sohei Nakatsuka, Taishi Imaizumi, Ken Hattori, Tadashi Abukawa, Azusa N. Hattori, Hidekazu Tanaka |
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| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
High energy
Materials science Si micro-structures business.industry Scanning electron microscope Bioengineering Surface structure Surfaces and Interfaces Condensed Matter Physics Reflection high energy electron diffraction Surfaces Coatings and Films Optics Electron diffraction Mechanics of Materials Reflection (physics) business Scanning electron microscopy Beam (structure) Biotechnology |
| Zdroj: | e-Journal of Surface Science and Nanotechnology. 19:13-19 |
| ISSN: | 1348-0391 |
| Popis: | Spatially arranged surfaces on the micro-rod structure, which was three-dimensionally (3D) architected on a Si(110) substrate have been thoroughly investigated by a system with micro-beam reflection high-energy electron diffraction (μ-RHEED) and scanning electron microscopy (SEM). The combination of μ-RHEED and SEM realized analytical structure investigation of 3D surfaces with the spatial resolution of sub micrometer for the 3D rectangular shaped rod consisting of a (110) top surface (20 μm wide) and {111} vertical side surfaces (10 μm wide). Exhaustive mapping revealed the peculiar reconstructed surface structures: Si(110) “16 × 2” single domain and {35 47 7} facet surfaces locally appeared on the interconnected edge region on the 3D structure in addition to the “16 × 2” and 7 × 7 super structures on flat top (110) and side {111} surfaces, respectively. The formation mechanism for “16 × 2” single-domain structure near the corner edge of the (110) surfaces and {35 47 7} facets on the corner edges between (110) and {111} surfaces were discussed from the viewpoint of the surface stability on the 3D geometrical shaped Si structure. |
| Databáze: | OpenAIRE |
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