Development of betavoltaic cell technology production based on microchannel silicon and its electrical parameters evaluation
Autor: | N.A. Fedulova, S. A. Legotin, A. S. Laryushkin, V V Starkov, Oleg Rabinovich, Sergey Didenko, B. I. Rogozev, V. N. Murashev, Eugene B. Yakimov, A. A. Krasnov, V.V. Cheverikin |
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Rok vydání: | 2017 |
Předmět: |
Betavoltaics
Radiation Microchannel Materials science Silicon Manufacturing process business.industry 020209 energy chemistry.chemical_element Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Cell technology Anode chemistry Etching (microfabrication) 0202 electrical engineering electronic engineering information engineering Optoelectronics 0210 nano-technology business |
Zdroj: | Applied Radiation and Isotopes. 121:71-75 |
ISSN: | 0969-8043 |
DOI: | 10.1016/j.apradiso.2016.12.019 |
Popis: | In the paper a manufacturing process of three-dimensional (3D) microchannel structure by silicon (Si) anodic etching was discussed. The possibility of microchannels formation allows to increase the active area more than 100 times. In this structure the p-n junction on the whole Si surface was formed. The obtained data allowed to evaluate the characteristics of the betavoltaic converter with a 3D structure by using isotope 63Ni with a specific activity of 10Ci/g. |
Databáze: | OpenAIRE |
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