The GaN/SiC Heterostructure-based Hydrogen SAW Sensor Operating in GHz Range
| Autor: | Š. Haščík, Gabriel Vanko, Tibor Lalinský, A. Bencurova, Pavol Nemec, M. Tomaska, Ivan Rýger |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Silicon Carbide business.industry Surface acoustic wave Surface Acoustic Waves Electrical engineering Delay line oscillator Gallium nitride General Medicine High-electron-mobility transistor High Electron Mobility Transistor chemistry.chemical_compound Transducer chemistry Silicon carbide Optoelectronics Insertion loss business Delay Line Oscillator Engineering(all) Electronic filter |
| Zdroj: | Procedia Engineering. 87:260-263 |
| ISSN: | 1877-7058 |
| DOI: | 10.1016/j.proeng.2014.11.657 |
| Popis: | In this work we demonstrate the fabrication process and electrical characterization of GaN/SiC heterostructure-based surface acoustic wave filters for highly-sensitive hydrogen sensors. In the acoustic propagation path, palladium metal is used as a hydrogen sensing layer. The influence of this layer on SAW velocity is measured. The impact of second-order effects on SAW filter properties is discussed. Two different interdigitated transducer (IDT) topologies are investigated in order to achieve the low insertion loss and high attenuation of triple transit echo (TTE). Finally, the sensory performance of designed delay line SAW oscillator is demonstrated |
| Databáze: | OpenAIRE |
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