New Generation of On-Wafer Microwave Probe Station for Precision GSG Probing
| Autor: | Cerine Mokhtari, Mohamed Sebbache, CleMent Lenoir, Christophe Boyaval, Vanessa Avramovic, Gilles Dambrine, Kamel Haddadi |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Circuits Systèmes Applications des Micro-ondes - IEMN (CSAM - IEMN ), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN), Plateforme de Caractérisation Multi-Physiques - IEMN (PCMP - IEMN), Advanced NanOmeter DEvices - IEMN (ANODE - IEMN), The project is supported by the Nano 2022 Plan in the frame of the common lab IEMN / STMicroelectronics and by the European Metrology Programme for Innovation and Research (EMPIR) Project 18SIB09 Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies. The EMPIR Programme is co-financed by the Participating States and from the European Union’s Horizon 2020 Research and Innovation Programme., Laboratoire commun STMicroelectronics-IEMN T1, PCMP CHOP, Renatech Network, CMNF |
| Jazyk: | angličtina |
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | 24th International Microwave and Radar Conference, MIKON 2022 24th International Microwave and Radar Conference, MIKON 2022, Sep 2022, Gdansk, Poland |
| Popis: | International audience; Accurate characterization of emergent RF extreme impedance micro-and nanoelectronic devices requires novel probing techniques to ensure the probe-to-pad contact repeatability. In this effort, a new generation of nanorobotics on-wafer probing station is developed. Residual calibration error terms related to probe-to-device approach / retract are quantified in the frequency range 50 MHz – 50 GHz. These residual error terms are propagated to determine the overall measurement uncertainty on the determination of extreme complex impedances. In particular, preliminary results considering capacitance value of 1 fF at 10 GHz demonstrate error around 17% versus 80% using a conventional probe station. |
| Databáze: | OpenAIRE |
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