Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening
| Autor: | Aaron J. Danner, Andrew A. Bettiol, Noriaki Toyoda, Bandar Alshehri, H. D. Liang, Eric Jun Hao Cheung, Elhadj Dogheche, Shawn Yohanes Siew |
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| Přispěvatelé: | National University of Singapore (NUS), University of Hyogo, Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Renatech Network, Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Optoélectronique - IEMN (OPTO - IEMN) |
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science Ion beam Lithium niobate Physics::Optics chemistry.chemical_element 02 engineering and technology 01 natural sciences 010309 optics chemistry.chemical_compound [SPI]Engineering Sciences [physics] Optics Etching 0103 physical sciences Thin film Argon business.industry 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics OCIS: 130.0130 190.0190 220.0220 230.7370 chemistry [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic Ion milling machine 0210 nano-technology business Single crystal |
| Zdroj: | Optics Express Optics Express, 2018, 26 (4), pp.4421-4430. ⟨10.1364/OE.26.004421⟩ Optics Express, Optical Society of America-OSA Publishing, 2018, 26 (4), pp.4421-4430. ⟨10.1364/OE.26.004421⟩ |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.26.004421⟩ |
| Popis: | International audience; Lithium niobate's use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applications in integrated optics due to the availability of a strong electro-optic effect in this material coupled with the possibility of strong vertical index confinement. However, sidewalls of etched waveguides are typically rough in most etching procedures, exacerbating propagation losses. In this paper, we propose a fabrication method that creates significantly smoother ridge waveguides. This involves argon ion milling and subsequent gas clustered ion beam smoothening. We have fabricated and characterized ultra-low loss waveguides with this technique, with propagation losses as low as 0.3 dB/cm at 1.55 mu m. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. |
| Databáze: | OpenAIRE |
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