Behavior of ECR microwave plasma formed in a mirror
Autor: | Z.Y. Ning, Y.C. Shi, Z.X. Ren, Z.P. Luo |
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Rok vydání: | 1992 |
Předmět: |
Range (particle radiation)
Dense plasma focus Materials science Waves in plasmas Chemistry business.industry Dielectric Condensed Matter Physics Magnetostatics Ion source Electron cyclotron resonance Surfaces Coatings and Films Magnetic field Plasma window Optics Physics::Plasma Physics Electromagnetic electron wave Inductively coupled plasma business Instrumentation Layer (electronics) Microwave |
Zdroj: | Vacuum. 43:1101-1104 |
ISSN: | 0042-207X |
DOI: | 10.1016/0042-207x(92)90343-u |
Popis: | Microwave plasma were produced and studied in a cylindrical chamber with a mirror and divergent magnetic fields. A circular TE 11 mode of 2.45 GHz was introduced into the plasma chamber via a dielectric vacuum window. It was found that microwave breakdowns occurred at sites where the static magnetic field was 875 G. There were two peaks of the plasma density and absorbed microwave power as a function of pressure in the range of 10 −3 −1 Pa. By moving the position of the ECR layer, it was found that the reflected microwave power had periodicity. |
Databáze: | OpenAIRE |
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