Behavior of ECR microwave plasma formed in a mirror

Autor: Z.Y. Ning, Y.C. Shi, Z.X. Ren, Z.P. Luo
Rok vydání: 1992
Předmět:
Zdroj: Vacuum. 43:1101-1104
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90343-u
Popis: Microwave plasma were produced and studied in a cylindrical chamber with a mirror and divergent magnetic fields. A circular TE 11 mode of 2.45 GHz was introduced into the plasma chamber via a dielectric vacuum window. It was found that microwave breakdowns occurred at sites where the static magnetic field was 875 G. There were two peaks of the plasma density and absorbed microwave power as a function of pressure in the range of 10 −3 −1 Pa. By moving the position of the ECR layer, it was found that the reflected microwave power had periodicity.
Databáze: OpenAIRE