Microfabrication techniques using focused ion beams and emergent applications
| Autor: | M.J Vasile, J Xie, H Guo, R Nassar |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Microsurgery
Materials science Fabrication Ion beam Microcirculation General Physics and Astronomy Mechanical engineering Gallium Nanotechnology Cell Biology Models Theoretical Focused ion beam Rats Computer Science::Other Mice Surface micromachining Machining Structural Biology Deflection (engineering) Microscopy Electron Scanning Animals General Materials Science Ion milling machine Microfabrication |
| Zdroj: | Micron. 30:235-244 |
| ISSN: | 0968-4328 |
| DOI: | 10.1016/s0968-4328(99)00008-6 |
| Popis: | The application of focused ion beam (FIB) machining in several technologies aimed at microstructure fabrication is presented. These emergent applications include the production of micromilling tools for machining of metals and the production of microsurgical tools. An example of the use of microsurgical manipulators in a circulatory system measurement is presented. The steps needed to transform the laboratory fabrication of these tools and manipulators into a routine FIB production process are discussed. The ion milling of three-dimensional cavities by the exact solution of a mathematical model of the FIB deflection is demonstrated. A good agreement between the model calculation and the ion beam control has been obtained for parabolic and cosine cross-section features with planes of symmetry. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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