Method of calculating the aberrations of soft X-ray and vacuum ultraviolet optical systems
| Autor: | Yiqing Cao, Zhijuan Shen, Zhixia Zheng |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Physics
Optics and Photonics Nuclear and High Energy Physics Soft x ray Radiation Vacuum Ultraviolet Rays business.industry X-Rays 02 engineering and technology Models Theoretical 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics Vacuum ultraviolet Optics Software Extreme ultraviolet 0103 physical sciences Shadow 0210 nano-technology business Instrumentation Synchrotrons |
| Zdroj: | Journal of Synchrotron Radiation. 26:1558-1564 |
| ISSN: | 1600-5775 |
| DOI: | 10.1107/s1600577519007823 |
| Popis: | Based on the the third-order aberration theory of plane-symmetric optical systems, this paper studies the effect on aberrations of the second-order accuracy of aperture-ray coordinates and the extrinsic aberrations of this kind of optical system; their calculation expressions are derived. The resultant aberration expressions are then applied to calculate the aberrations of two design examples of soft X-ray and vacuum ultraviolet (XUV) optical systems; images are compared with ray-tracing results using SHADOW software to validate the aberration expressions. The study shows that the accuracy of the aberration expressions is satisfactory. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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