Silicon doped diamond-like carbon films as a coating for improvement of electron field emission

Autor:	A.G. Chakhovskoi, T E Felter, V.G. Litovchenko, Anatoliy Evtukh, Yu.M. Litvin, D.V. Fedin
Předmět:	Field electron emission Materials science Carbon film Diamond-like carbon Silicon chemistry Plasma-enhanced chemical vapor deposition Doping Nanocrystalline silicon chemistry.chemical_element Nanotechnology LOCOS
Zdroj:	Scopus-Elsevier
Popis:	In this work the influence of in-situ silicon doping of PECVD DLC films on their properties and emission parameters of silicon tip array coated such films have been investigated. The idea was to make easier the electron transport from silicon tip through DLC film and enhance the field emission efficiency from silicon tips coated silicon doped DLC films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::57ef36aa53ba2ce2d98092a4528d8e49 http://www.scopus.com/inward/record.url?eid=2-s2.0-0035784320&partnerID=MN8TOARS Zobrazit plný text záznamu