Analysis and detection of low-energy electrons in scanning electron microscopes using a Bessel box electron energy analyser
| Autor: | C. G. H. Walker, Cem Kincal, Umut Kamber, Ashish Suri, Oguzhan Gurlu, Andrew Pratt, Mohamed M. El-Gomati, S. P. Tear |
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| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Scanning electron microscope Analyser 02 engineering and technology Electron 01 natural sciences law.invention symbols.namesake Optics law 0103 physical sciences Physical and Theoretical Chemistry Spectroscopy 010302 applied physics Radiation Graphene business.industry Resolution (electron density) Detector 021001 nanoscience & nanotechnology Condensed Matter Physics Sample (graphics) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials symbols 0210 nano-technology business Bessel function |
| Zdroj: | Journal of Electron Spectroscopy and Related Phenomena, 241 |
| ISSN: | 0368-2048 |
| Popis: | The interpretation of images generated by scanning electron microscopes (SEMs) requires quantifiable and well-understood contrast. Furthermore, recent interest in probing samples using low-energy electrons to extract surface information is pushing towards the quantification of relative contrast in secondary-electron (SE) images. The detection and analysis of low-energy SEs remains at the heart of the development of such instruments and techniques. However, state-of-the-art SE detectors in most SEMs, which are largely using in-lens configurations, are mainly designed to favour the collection of primary-induced SEs, and hence fail to provide electron energy information that could be related to the sample composition. Here, we report on the development of a novel SE detector which makes use of the Bessel box (BB) electron energy analyser. We demonstrate a very compact analyser design (˜a volume of 12 mm3) through simulations and by acquiring an electron spectrum from a sample of graphene on copper. A resolution of 0.3% has been numerically computed and experimentally verified for the BB analyser. (© 2019 Elsevier). ISSN:0368-2048 ISSN:1873-2526 |
| Databáze: | OpenAIRE |
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