Comparative studies of EFG poly-Si grown by different procedures

Autor: B.N. Evtody, Vesna Borjanović, Eugene A. Katz, Ivana Kovačević, Branko Pivac
Rok vydání: 2002
Předmět:
Zdroj: Solar Energy Materials and Solar Cells. 72:165-171
ISSN: 0927-0248
Popis: The impurity content in EFG polycrystalline silicon materials grown by different procedures from graphite and quartz crucible has been extensively studied using Fourier transform IR technique. It is shown that the oxygen content in the material is much more dependent on the growth atmosphere at meniscus than on the type of crucible. In all samples the carbon content remains supersaturated up to very high temperatures of annealing, not affected by the oxygen presence.
Databáze: OpenAIRE