Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing
| Autor: | Zemzem Uyanik, Fulya Turkoglu, Hasan Koseoglu, Merve Ekmekcioglu, Bengu Ata, Yasemin Demirhan, Mehtap Ozdemir, Gulnur Aygun, Lutfi Ozyuzer |
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| Přispěvatelé: | Mühendislik ve Doğa Bilimleri Fakültesi -- Metalurji ve Malzeme Mühendisliği Bölümü, Türkoğlu, Fulya, Köseoğlu, Hasan |
| Rok vydání: | 2022 |
| Předmět: |
Infrared devices
Opacity Electronics devices Silver Layer Transparent electrodes Performance Visible region Transparency ITO thin-films Annealing 'current Engineering Optical-properties Indium compounds Transparent conducting oxide electrodes Sheet Resistance Materials Chemistry Optical multilayers Transparent conducting oxides Electrical and Electronic Engineering Deposition Crystallinity Instrumentation Optoelectronics property High-performance Physics Process Chemistry and Technology Temperature Tin oxides Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ag thickness Self-heating Transparent Science & Technology - Other Topics Zinc Oxide As-grown Indium tin oxides (ITO) Magnetron sputtering |
| Zdroj: | Journal of Vacuum Science & Technology B. 40:042204 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/6.0001868 |
| Popis: | Indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO) multilayers have attracted much attention to fulfill the growing need for high-performance transparent conducting oxide electrodes. To make these transparent multilayers work better, electro-annealing, which is a method of self-heating by electric current, can be effective. Moreover, the effect of current on ITO/Ag/ITO multilayers should be investigated to make sure that electronic devices will be reliable over their lifetime. In this study, ITO/Ag/ITO multilayer electrodes with varying Ag thicknesses were grown by DC magnetron sputtering at room temperature. Structural, optical, and electrical properties of these multilayers were investigated before and after electro-annealing. Measurement results revealed that improved optical transmittance and sheet resistance can be obtained by the optimization of Ag thickness for the as-grown ITO/Ag/ITO layers. The highest figure of merit (FoM) value of 17.37 × 10−3 Ω−1 with optical transmittance of 85.15% in the visible region and sheet resistance of 11.54 Ω/□ was obtained for the Ag thickness of 16.5 nm for as-grown samples. The electro-annealing of as-grown ITO/Ag/ITO multilayers led to improved optical behavior of the multilayer structure over a wide spectral range, especially in the near-infrared range. Electro-annealing also provided an improvement in the crystallinity and sheet resistance of the electrodes. The improvement of the electrical and optical properties of the structure enabled a FoM of 23.07 × 10−3 Ω−1 with the optical transmittance of 86.80% in the visible region and sheet resistance of 10.52 Ω/□. The findings of this work provide proper knowledge of the properties of ITO/Ag/ITO multilayers under electrical current and suggest that the overall performance of the multilayers can be improved by the electro-annealing process. |
| Databáze: | OpenAIRE |
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