In-plane piezoelectric coefficient of PZT thin films as a function of composition
| Autor: | Stephane Hiboux, Nicolas Ledermann, Andreas Seifert, Paul Muralt, M.-A. Dubois, D. V. Taylor |
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| Rok vydání: | 1999 |
| Předmět: |
Materials science
Piezoelectric coefficient piezoelectricity Analytical chemistry Dielectric Composition (combinatorics) sensors Condensed Matter Physics Ferroelectricity Piezoelectricity ferroelectricity Electronic Optical and Magnetic Materials Tetragonal crystal system thin films Thin film Phase diagram |
| Zdroj: | Ferroelectrics. 224:235-242 |
| ISSN: | 1563-5112 0015-0193 |
| DOI: | 10.1080/00150199908210572 |
| Popis: | The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than or equal to 45% Zr, i.e., in the tetragonal part of the phase diagram. |
| Databáze: | OpenAIRE |
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