Effect of the substrate temperature during gold-copper alloys thin film deposition by magnetron co-sputtering on the dealloying process
Autor: | Adrien Chauvin, Lukáš Horák, Pierre-Yves Tessier, Elen Duverger-Nédellec, Abdel-Aziz El Mel, Milan Dopita |
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Přispěvatelé: | Charles University [Prague] (CU), Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN) |
Jazyk: | angličtina |
Rok vydání: | 2020 |
Předmět: |
Materials science
Nanoporous Scanning electron microscope Nanotechnology 02 engineering and technology Surfaces and Interfaces General Chemistry Substrate (electronics) 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Sputtering Residual stress Cavity magnetron Materials Chemistry [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Deposition (phase transition) Thin film 0210 nano-technology ComputingMilieux_MISCELLANEOUS |
Zdroj: | Surface and Coatings Technology Surface and Coatings Technology, Elsevier, 2020, 383, pp.125220. ⟨10.1016/j.surfcoat.2019.125220⟩ |
ISSN: | 0257-8972 |
DOI: | 10.1016/j.surfcoat.2019.125220⟩ |
Popis: | Nanoporous gold is of great interest for many applications due to its three dimensional interconnected porosity at nanoscale. Among all currently use techniques to obtain nanoporous gold, dealloying is one of the most used method to create a well-controlled nanoporous morphology. Only few studies report on the creation of nanoporous gold from alloy thin film deposited by magnetron co-sputtering. However, this deposition technique allows easy tune of the morphology at nanoscale. In this paper, we report on the creation of different morphologies of nanoporous gold obtained after dealloying in nitric acid of Au-Cu thin film deposited by magnetron co-sputtering. The influence of the substrate temperature during film deposition is studied by means of scanning electron microscopy and X-ray scattering analysis. We demonstrate the impact of the as-grown thin film morphology on the final nanoporous structure. We further explain the relationship between the different nanoporous morphologies and the residual stress on the as-grown thin film. |
Databáze: | OpenAIRE |
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