Optofluidic notch filter integration by lift-off of thin films
| Autor: | Philip Measor, Holger Schmidt, Brian S. Phillips, Aaron R. Hawkins, Yue Zhao |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2010 |
| Předmět: |
Analyte
ocis:(130.0130) Integrated Optics Materials science business.industry ocis:(130.7408) Wavelength Filter Devices 02 engineering and technology Filter (signal processing) Surface-enhanced Raman spectroscopy Sputter deposition Selective deposition Band-stop filter 01 natural sciences Atomic and Molecular Physics and Optics 010309 optics Lift (force) 020210 optoelectronics & photonics Optics 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Research-Article Thin film business |
| Zdroj: | Optics Express |
| ISSN: | 1094-4087 |
| Popis: | Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for approximately 1 cm long chips consisting of liquid-core and solid-core waveguides. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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