MEMS-Based Terahertz Detectors
| Autor: | Hamdi Torun, Habib Bilgin, Arda D. Yalcinkaya |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Microelectromechanical systems
Materials science Pixel F300 business.industry Terahertz radiation Detector Metamaterial General Medicine Noise-equivalent temperature Microstructure Thermal expansion Optoelectronics MEMS Terahertz Technology detectors metamaterials optical readout business Engineering(all) |
| Zdroj: | Procedia Engineering. 120:15-19 |
| ISSN: | 1877-7058 |
| DOI: | 10.1016/j.proeng.2015.08.556 |
| Popis: | A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200μm × 200μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz. |
| Databáze: | OpenAIRE |
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