Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS 2
| Autor: | Mukesh Tripathi, Michal Macha, Jochem Deen, Martina Lihter, Aleksandra Radenovic, Mukeshchand Thakur, Michael Graf, Andrey Chernev, Andras Kis |
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| Rok vydání: | 2020 |
| Předmět: |
Fabrication
Materials science Mono layer Nanotechnology 02 engineering and technology General Chemistry Chemical vapor deposition 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 2D materials biosensing growth molybdenum disulfide nanopores transfer wafer-scale 0104 chemical sciences chemistry.chemical_compound Nanopore chemistry Molecule General Materials Science Wafer 0210 nano-technology Biosensor DNA |
| Zdroj: | Small Methods |
| ISSN: | 2366-9608 |
| DOI: | 10.1002/smtd.202000072 |
| Popis: | Atomically thin (2D) nanoporous membranes are an excellent platform for a broad scope of academic research. Their thickness and intrinsic ion selectivity (demonstrated for example in molybdenum disulfide-MoS2) make them particularly attractive for single-molecule biosensing experiments and osmotic energy harvesting membranes. Currently, one of the major challenges associated with the research progress and industrial development of 2D nanopore membrane devices is small-scale thin-film growth and small-area transfer methods. To address these issues, a large-area protocol including a wafer-scale monolayer MoS2 synthesis, Si/SiNx substrate fabrication and wafer-scale material transfer are demonstrated. First, the 7.62 cm wafer-scale MOCVD growth yielding homogenous monolayer MoS2 films are introduced. Second, a large number of devices are fabricated in one batch by employing the wafer-scale thin-film transfer method with high transfer efficiency (>70% device yield). The growth, the transfer quality and cleanliness are investigated using transmission electron microscopy, atomic force microscopy and Raman spectroscopy. Finally, the applicability and robustness of the large-area protocol is demonstrated by performing a set of double-stranded DNA translocation experiments through as-fabricated MoS2 nanopore devices. It is believed that the shown approach will pave the way toward wafer-scale, high-throughput use of 2D nanopores in various applications. |
| Databáze: | OpenAIRE |
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