Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage
| Autor: | Chunxiang Zhu, Bao Zhu, Hong-Liang Lu, David Wei Zhang, Shi-Jin Ding, Anquan Jiang, Qing-Qing Sun, Lian-Jie Li |
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| Rok vydání: | 2012 |
| Předmět: |
AAO
Energy storage Materials science Nano Express business.industry Nanochemistry Nanotechnology RC time constant Condensed Matter Physics Capacitance Anode law.invention Atomic layer deposition Capacitor Materials Science(all) Stack (abstract data type) law Nanocapacitor arrays Optoelectronics General Materials Science business Capacitance density |
| Zdroj: | Nanoscale Research Letters |
| ISSN: | 1556-276X |
| DOI: | 10.1186/1556-276x-7-544 |
| Popis: | High density three-dimensional AZO/Al2O3/AZO nanocapacitor arrays have been fabricated for energy storage applications. Using atomic layer deposition technique, the stack of AZO/Al2O3/AZO has been grown in the porous anodic alumina template which is directly formed on the Si substrate. The fabricated capacitor shows a high capacitance density of 15.3 fF/μm2 at 100 kHz, which is nearly 2.5 times over the planar capacitor under identical conditions in theory. Further, the charge-discharge characteristics of the capacitor are characterized, indicating that the resistance-capacitance time constants are equal to 300 ns for the charging and discharging processes, and have no dependence on the voltage supply. This reflects good power characteristics of the electrostatic capacitor. |
| Databáze: | OpenAIRE |
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