Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical detection
| Autor: | M. Olszacki, Isabella Augustyniak, Émilie Debourg, P. Knapkiewicz, Patrick Pons, K. Sareło, Jan Dziuban |
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| Přispěvatelé: | Wroclaw University of Science and Technology, Équipe MIcro et Nanosystèmes pour les Communications sans fil (LAAS-MINC), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), National Center for Nuclear Research (NCBJ), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées |
| Rok vydání: | 2015 |
| Předmět: |
Microelectromechanical systems
Materials science Hydrogen business.industry Metals and Alloys chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials [SPI]Engineering Sciences [physics] Interferometry Membrane Optics chemistry Radiolysis High-density polyethylene Irradiation Electrical and Electronic Engineering business Instrumentation Displacement (fluid) |
| Zdroj: | Sensors and Actuators A: Physical Sensors and Actuators A: Physical, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩ Sensors and Actuators A: Physical, Elsevier, 2015, 232, pp. 353-358. ⟨10.1016/j.sna.2015.05.006⟩ |
| ISSN: | 0924-4247 1873-3069 |
| Popis: | International audience; The silicon-glass MEMS high dose radiation sensor with the optical read-out, acting above 10 kGy has been presented. The sensor consists of a microchamber filled with small portion of high density polyethy-lene (HDPE) and thin silicon membrane. The principle of operation of the sensor is based on radiolysis effect of the HDPE which, upon radiation exposure, releases the hydrogen. The hydrogen increases the pressure inside the microchamber causing the deflection of the membrane, which is proportional to the pressure, thus to radiation dose. The sensor has been irradiated with high energy electron beam with dose 5 ÷ 40 kGy. The displacement of the membrane has been detected by optical interferometer. The relative generated pressure inside the sensor chamber has been found very high (up to 180 kPa). It shows that response of a micro-scaled MEMS sensor is much more effective in comparison to macro-scaled solutions. |
| Databáze: | OpenAIRE |
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