Design, fabrication, and characterization of Deep-Etched waveguide gratings
| Autor: | C. De Angelis, H. M. van Driel, Andrea Locatelli, Daniele Modotto, Roberto Morandotti, J. P. Mondia, Colin Stanley, S. Linden, T.C. Kleckner, J.S. Aitchison |
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| Jazyk: | angličtina |
| Rok vydání: | 2005 |
| Předmět: |
Diffraction
Materials science business.industry TK Defect waveguides 02 engineering and technology Grating 01 natural sciences Waveguide (optics) Atomic and Molecular Physics and Optics Semiconductor laser theory 010309 optics 020210 optoelectronics & photonics Optics semiconductor waveguides photonic crystals 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Wafer Reactive-ion etching business Diffraction grating Electron-beam lithography |
| ISSN: | 0733-8724 |
| Popis: | One-dimensional (1-D) deep-etched gratings on a specially grown AlGaAs wafer were designed and fabricated. The gratings were fabricated using state-of-the-art electron beam lithography and high-aspect-ratio reactive ion etching (RIE) in order to achieve the required narrow deep air slots with good accuracy and reproducibility. Since remarkable etch depths (up to 1.5 /spl mu/m), which completely cut through the waveguide core layer, have been attained, gratings composed of only five periods (and, thus, shorter than 6 /spl mu/m) have a bandgap larger than 100 nm. A defect was introduced by increasing the width of the central semiconductor tooth to create microcavities that exhibit a narrow transmission peak (less than 7 nm) around the wavelength of 1530 nm. The transmission spectra between 1460 and 1580 nm have been systematically measured, and the losses have been estimated for a set of gratings, both with and without a defect, for different periods and air slot dimensions. Numerical results obtained via a bidirectional beam propagation code allowed the evaluation of transmissivity, reflectivity, and diffraction losses. By comparing experimental results with the authors' numerical findings, a clear picture of the role of the grating's geometric parameters in determining its spectral features and diffractive losses is illustrated. |
| Databáze: | OpenAIRE |
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