The design, fabrication and characterization of fluidic membranes for micro-engines with the aim of frequency lowering
| Autor: | M. de Labachelerie, Ravinder Chutani, Fabien Formosa, François Lanzetta, Adrien Badel |
|---|---|
| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire SYstèmes et Matériaux pour la MEcatronique (SYMME), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry]) |
| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science Silicon chemistry.chemical_element Nanotechnology 02 engineering and technology 01 natural sciences [SPI.AUTO]Engineering Sciences [physics]/Automatic [SPI.MAT]Engineering Sciences [physics]/Materials Planar 0103 physical sciences Wafer Fluidics [PHYS.MECA.MEFL]Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph] [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Electrical and Electronic Engineering ComputingMilieux_MISCELLANEOUS [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] 010302 applied physics business.industry Mechanical Engineering [SPI.NRJ]Engineering Sciences [physics]/Electric power technology industry and agriculture 021001 nanoscience & nanotechnology Electronic Optical and Magnetic Materials Membrane chemistry Mechanics of Materials Anodic bonding [PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph] Optoelectronics 0210 nano-technology business Microfabrication |
| Zdroj: | Journal of Micromechanics and Microengineering Journal of Micromechanics and Microengineering, IOP Publishing, 2016, 26 (12), pp.124009-124016. ⟨10.1088/0960-1317/26/12/124009⟩ |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/26/12/124009 |
| Popis: | This paper describes the design, microfabrication and linear dynamic characterization of low frequency thick membranes as a potential technological solution for resonant micro-engines, for which classical pistons cannot be used. The proposed structure is called a hybrid fluid–membrane and consists of two thin flexible membranes that encapsulate an incompressible fluid. Lower frequency structures, compared to geometrically equivalent single layer membranes, are thus obtained. Each flexible membrane is based on a composite structure which comprises a silicon planar logarithmic spiral spring embedded in a room temperature vulcanization silicone polymer. Thus, the stiffness and sealing features are dissociated for a better design control. The developed realization and assembly process is demonstrated at the wafer level. The process involves the anodic bonding of multiple stacks of silicon/glass structures, fluid filling and sealing. Various dimensions of hybrid fluid–membranes are successfully fabricated. Their dynamic characterization underlines the agreement between experimental and theoretical results. The results provide the opportunity for the design and fabrication of low frequency membranes to match the dynamics requirements of micro-engines. |
| Databáze: | OpenAIRE |
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