The Scanning Electron Microscope As An Accelerator For The Undergraduate Advanced Physics Laboratory

Autor:	Randolph S. Peterson, Karl K. Berggren, Mark Mondol, Floyd D. McDaniel, Barney L. Doyle
Přispěvatelé:	Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology. Research Laboratory of Electronics, Peterson, Randolph S., Berggren, Karl K., Mondol, Mark K.
Rok vydání:	2011
Předmět:	Accelerator physics Physics Microscope law Scanning electron microscope Nanotechnology Experimental work Lithography Engineering physics law.invention
Zdroj:	MIT web domain
ISSN:	0094-243X
Popis:	Few universities or colleges have an accelerator for use with advanced physics laboratories, but many of these institutions have a scanning electron microscope (SEM) on site, often in the biology department. As an accelerator for the undergraduate, advanced physics laboratory, the SEM is an excellent substitute for an ion accelerator. Although there are no nuclear physics experiments that can be performed with a typical 30 kV SEM, there is an opportunity for experimental work on accelerator physics, atomic physics, electron‐solid interactions, and the basics of modern e‐beam lithography. National Science Foundation (U.S.) (Grant 0823778)
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::51d402c464a66dac2d06581c4c7b2999 https://doi.org/10.1063/1.3586204 Zobrazit plný text záznamu