Design and characterization of an RF plasma cleaner
| Autor: | L. F. Ruchko, G.P. Canal, R.M.O. Galvão, H. Luna |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Physics
Field (physics) Plasma cleaning business.industry Langmuir probe General Physics and Astronomy Plasma Characterization (materials science) symbols.namesake RF discharge Physics::Plasma Physics Impurity plasma cleaner symbols Optoelectronics Vacuum chamber Antenna (radio) Atomic physics business |
| Zdroj: | Brazilian Journal of Physics v.40 n.1 2010 Brazilian Journal of Physics Sociedade Brasileira de Física (SBF) instacron:SBF Brazilian Journal of Physics, Volume: 40, Issue: 1, Pages: 108-114, Published: MAR 2010 |
| ISSN: | 0103-9733 |
| DOI: | 10.1590/s0103-97332010000100015 |
| Popis: | The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function. |
| Databáze: | OpenAIRE |
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