Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity
| Autor: | Andreas Naesby, Aurélien Dantan, Bhagya Nair, Bjarke R. Jeppesen |
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| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
piezoelectric actuation
Materials science FOS: Physical sciences Physics::Optics Substrate (electronics) Grating 01 natural sciences Focused ion beam subwavelength grating 010305 fluids & plasmas chemistry.chemical_compound Mesoscale and Nanoscale Physics (cond-mat.mes-hall) 0103 physical sciences Thin film 010306 general physics Rigorous coupled-wave analysis Mathematical Physics ULTRASOUND Condensed Matter - Mesoscale and Nanoscale Physics business.industry suspended thin films Fano resonance REFLECTORS Condensed Matter Physics Atomic and Molecular Physics and Optics OPTOMECHANICAL SYSTEM Silicon nitride chemistry Optoelectronics business Electron-beam lithography |
| Zdroj: | Nair, B, Næsby, A, Jeppesen, B R & Dantan, A R 2019, ' Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity ', Physica Scripta, vol. 94, no. 12, 125013 . https://doi.org/10.1088/1402-4896/ab3d6f |
| DOI: | 10.1088/1402-4896/ab3d6f |
| Popis: | We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm-thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transverse profile through localized cuts of the suspended film with a Focused Ion Beam. By mounting the membrane chip on a ring piezoelectric transducer and applying a compressive force to the substrate we subsequently observe a shift of the transmission spectrum by 0.23 nm. Comment: 8 pages, 5 figures |
| Databáze: | OpenAIRE |
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