Staircase array of inclined refractive multi‐lenses for large field of view pixel super‐resolution scanning transmission hard X‐ray microscopy

Autor: Talgat Mamyrbayev, Katsumasa Ikematsu, Hidekazu Takano, Yanlin Wu, Kenji Kimura, Patrick Doll, Arndt Last, Atsushi Momose, Pascal Meyer
Přispěvatelé: Mamyrbayev, Talgat, 1Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344Eggenstein-Leopoldshafen, Baden-Württemberg, Germany, Ikematsu, Katsumasa, 2Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi980-8577, Japan, Takano, Hidekazu, Wu, Yanlin, Kimura, Kenji, Doll, Patrick, Last, Arndt, Momose, Atsushi
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Nuclear and High Energy Physics
Materials science
Photon
EBL
deep X‐ray lithography and electroplating
scanning transmission hard X-ray microscopy
deep X-ray lithography and electroplating
Synchrotron radiation
Field of view
pixel super-resolution
scanning transmission hard X‐ray microscopy
02 engineering and technology
XRL
01 natural sciences
inclined refractive X-ray multi-lens array
law.invention
010309 optics
Optics
law
Technologien DLW
0103 physical sciences
Microscopy
502.82
Proposal 2017-019-020309
pixel super‐resolution
Instrumentation
Image resolution
Lithography
Engineering & allied operations
inclined refractive X‐ray multi‐lens array
Radiation
business.industry
Detector
021001 nanoscience & nanotechnology
Research Papers
Synchrotron
ddc:620
0210 nano-technology
business
Zdroj: Journal of Synchrotron Radiation
Journal of synchrotron radiation, 28 (3), 732-740
ISSN: 1600-5775
Popis: Owing to the development of X‐ray focusing optics during the past decades, synchrotron‐based X‐ray microscopy techniques allow the study of specimens with unprecedented spatial resolution, down to 10 nm, using soft and medium X‐ray photon energies, though at the expense of the field of view (FOV). One of the approaches to increase the FOV to square millimetres is raster‐scanning of the specimen using a single nanoprobe; however, this results in a long data acquisition time. This work employs an array of inclined biconcave parabolic refractive multi‐lenses (RMLs), fabricated by deep X‐ray lithography and electroplating to generate a large number of long X‐ray foci. Since the FOV is limited by the pattern height if a single RML is used by impinging X‐rays parallel to the substrate, many RMLs at regular intervals in the orthogonal direction were fabricated by tilted exposure. By inclining the substrate correspondingly to the tilted exposure, 378000 X‐ray line foci were generated with a length in the centimetre range and constant intervals in the sub‐micrometre range. The capability of this new X‐ray focusing device was first confirmed using ray‐tracing simulations and then using synchrotron radiation at BL20B2 of SPring‐8, Japan. Taking account of the fact that the refractive lens is effective for focusing high‐energy X‐rays, the experiment was performed with 35 keV X‐rays. Next, by scanning a specimen through the line foci, this device was used to perform large FOV pixel super‐resolution scanning transmission hard X‐ray microscopy (PSR‐STHXM) with a 780 ± 40 nm spatial resolution within an FOV of 1.64 cm × 1.64 cm (limited by the detector area) and a total scanning time of 4 min. Biomedical implant abutments fabricated via selective laser melting using Ti–6Al–4V medical alloy were measured by PSR‐STHXM, suggesting its unique potential for studying extended and thick specimens. Although the super‐resolution function was realized in one dimension in this study, it can be expanded to two dimensions by aligning a pair of presented devices orthogonally.
A new X‐ray focusing device generates hundreds of thousands of line foci, periodically spaced in the sub‐micrometre range, with centimetre length. It enables to achieve large FOV pixel super‐resolution scanning transmission hard X‐ray microscopy. image
Databáze: OpenAIRE
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